Firmennachrichten über Innovation in Vacuum Coating and Surface Engineering Technologies
Summary
Centered on the core theme of “Innovation in Vacuum Coating and Surface Engineering Technologies,” the 7th Vacuum Technology Exchange Conference officially commenced today in Shenzhen.
Guided by the core principle of “Breaking Technical Barriers and Fostering Industrial Synergy,” this conference features exchange sessions focused on three key topics: Atomic Layer Deposition (ALD), Chemical Vapor Deposition (CVD), and DLC/Ta-C Carbon-Based Coatings.
Bringing together international experts from academia, industry, and research institutions alongside technical leaders from leading enterprises, the conference will delve into the latest breakthroughs in key technologies, pathways for industrial implementation, and core industry challenges. It aims to establish an integrated platform for “technical exchange, resource matching, and achievement transformation,” empowering vacuum technology to achieve deep integration and widespread application in critical sectors such as semiconductors, new energy, and advanced materials.
1. ALD/CVD “Precision Control” Solves the Puzzle
Selecting valves for ALD/CVD systems requires not only meeting fundamental specifications but also aligning with process details. Achieving a breakthrough from “acceptable to premium” in vacuum coating and surface engineering hinges on “micron-level precision control” in ALD/CVD processes—where valve response speed and specialty gas system stability directly determine coating uniformity, purity, and yield rates.
In vacuum coating processes, the performance of fluid control equipment is critical. Our products excel in response speed, leak rate, and temperature resistance. Equipment featuring a 316L EP-grade stainless steel valve body with PTFE seals achieves a leak rate ≤1×10⁻¹² Pa·m³/s, meeting ALD process requirements. Our multi-orifice valves, designed for high-temperature ALD coating applications, withstand elevated temperatures while optimizing purge efficiency to minimize residual precursor effects on coating quality.
Our valve bodies are constructed from corrosion-resistant valve assemblies containing over 25% chromium-nickel-molybdenum alloy. The CVD process ensures continuous, long-term operation without corrosion or leakage. Regarding flow control, its multi-valve interlocking control system maintains flow deviation within ±0.2%, significantly outperforming the industry average precision standard of ±0.3%. This effectively resolves the industry challenge of “flow fluctuations causing coating thickness deviation.”
The “cleanliness, stability, and traceability” of specialty gas pipelines serve as the invisible safeguard for vacuum coating processes.
Pipeline Cleanliness
The cleanliness of pipeline inner walls must be strictly controlled. To this end, we have established a comprehensive cleanliness management system encompassing “cleaning, welding, purging, and inspection.” By employing a process combining “ultrasonic cleaning + high-purity nitrogen purging + passivation treatment,” the Ra value of pipeline inner walls consistently achieves 0.35μm.
Precise matching according to pressure rating
Pipeline pressures vary significantly across different vacuum coating scenarios (ALD typically ranges from 10⁻³ to 10⁻⁵ Pa, while CVD commonly operates at 0.1 to 0.5 MPa), necessitating connection methods compatible with the pressure rating.
· Low pressure (≤0.3 MPa): Double ferrule connections
· High pressure (≥0.5 MPa): Automatic TIG welding
· Ultra-high vacuum (≤1e-4 Pa): Metal-sealed flanges
Pressure Dynamic Equilibrium
Pulsed gas supply in the ALD process causes pipeline pressure fluctuations. If fluctuations exceed ±0.02 MPa, precursor concentration stability is compromised. By adjusting the upstream pressure regulator, we controlled inlet pressure fluctuations to ±0.005 MPa. Combined with real-time feedback regulation from a high-precision pressure sensor with ±0.1% FS accuracy, we ultimately achieved pipeline pressure fluctuations ≤±0.003 MPa, ensuring consistent ALD pulse jet concentration.
Special gas equipment must transition from “isolated operation” to “deep integration with the process.”
CVD processes typically require 2-4 gases mixed in fixed proportions. Therefore, we employ internationally leading high-precision mass flow controllers (MFCs) with measurement accuracy of ±0.05% FS, ensuring exceptional stability and reliability in fluid flow control. Equipped with our proprietary mixing algorithm, these controllers continuously monitor and compensate for the effects of gas temperature and pressure fluctuations on flow parameters.
The exhaust gas generated by the CVD process must meet emission standards. We employ an integrated exhaust gas treatment system.
Dry Adsorption Stage: Equipped with highly selective specialized adsorbents, this multi-stage adsorption system achieves ultra-high adsorption efficiency of ≥99.9%. Incineration Stage: For complex, hard-to-degrade organic compounds, a high-temperature pyrolysis environment is created. Combined with turbulent combustion enhancement technology, this achieves a deep decomposition rate of ≥99.99%, completely eliminating the risk of organic pollutants.
Integrated “Special Gas Cabinet + Piping + Equipment” System
To minimize interface points and reduce leakage risks, we offer an integrated solution. From specialty gas cabinet design (including purification, distribution, and safety controls) to pipeline welding and exhaust gas treatment equipment integration, the entire process is professionally executed by a single team.
Leveraging the Association as a Bridge to Advance Industry Technology
This conference on “Innovation in Vacuum Coating and Surface Engineering Technology” serves not only as a platform for industry-wide technological exchange but also exemplifies Wofei Technology's commitment to deepening industry connections and advancing “technology-empowered manufacturing.”
Moving forward, we will continue leveraging the Vacuum Technology Industry Association as a bridge, focusing on fluid control requirements for core processes like ALD/CVD. We aim to drive the implementation of more technological innovations, propelling vacuum coating and surface engineering technology toward a new era of higher precision and enhanced safety!
