Wofly Technology VMB Valve Manifold Distribution Box for Silane Applications

VMB Valve Assembly Distribution Box for Silanes

Dual Assurance of Safety and Precision in the Distribution of High-Risk Special Gases

01 Core Functions

Single-Source Multi-Path Distribution, Independent Branch Control

The equipment can split a single silane gas supply from an upstream specialty gas cabinet into multiple independent supply branches, simultaneously supplying gas to multiple process units, and supports customization of branches as needed. Each branch is equipped with an independent on/off valve and a pressure monitoring unit, enabling separate control of gas flow and shutdown for maintenance. Maintenance on a single branch does not interfere with normal gas supply to other branches, minimizing the risk of production line downtime.

Inert Purge and Vacuum Replacement to Ensure Operational Safety

The system features built-in high-purity nitrogen (PN₂) purge lines and vacuum extraction lines. Prior to branch maintenance, equipment startup or shutdown, or pipeline disassembly and reassembly, the target pipeline can undergo a full-process inert gas purge and vacuum replacement, thoroughly purging residual silane gas from the lines and preventing spontaneous combustion caused by silane coming into contact with air after the valve is opened. This fully complies with the safety operation requirements for silane systems outlined in the Engineering Technical Standards for Special Gas Systems.

316LEP-Grade Stainless Steel Piping

Real-Time Pressure Monitoring and Abnormal Condition Interlock Alerts

Each branch line is equipped with high-precision pressure gauges and pressure sensors that display real-time pressure conditions at the inlet and outlet, and support the configuration of upper and lower pressure limit alarms. Combined with pneumatic emergency shut-off valves, the system can rapidly cut off the corresponding branch line—or even the main gas supply—upon detecting risks such as abnormal pressure or gas leaks. It triggers audible and visual alarms and integrates with the plant’s central control system to achieve millisecond-level emergency response.

Negative-Pressure Sealed Protection, Centralized Leak Control

The system employs a fully enclosed cabinet structure, featuring a top exhaust port and a bottom intake grille, to maintain a stable negative pressure inside the cabinet during operation. Even in the event of a trace leak, silane gas is confined within the cabinet and centrally extracted via the exhaust system to the exhaust gas treatment unit, preventing the leaked gas from spreading into the production workshop and eliminating the risks of spontaneous combustion and poisoning at the spatial level.

02 Core Features

Safety Design Specifically for High-Risk Gases

Specifically optimized for silane’s self-ignition and explosive properties, the system can be equipped with built-in silane gas detectors and flame detection devices. All electrical components meet explosion-proof specifications, and the multi-layer safety interlock mechanism fully complies with control standards for high-risk specialty gases, far exceeding the safety level of standard inert gas VMBs.

Electronics-Grade High-Purity Gas Supply

All flow-through components are made of SS316L EP-grade stainless steel with electrolytically polished inner surfaces. Piping is fabricated using a fully automated track welding process, ensuring no dead corners and no particle release. Valves undergo helium leak testing with a leakage rate of ≤1×10⁻⁹ atm・cc/s, guaranteeing that silane gas purity remains uncompromised throughout the process and meeting the requirements of high-precision manufacturing processes.

Floor-Standing Design Offers Superior Adaptability

The floor-standing bracket design provides greater load-bearing capacity and eliminates the need for wall-mounted installation. It can be flexibly positioned in various settings, such as around cleanrooms or along specialty gas corridors, making it more adaptable to complex production line layouts compared to wall-mounted VMBs.

                                                                                                                                                                                                        VMB Internal Valves / Diaphragm Valves / Pressure Gauges

03 Core Application Scenarios

Semiconductor Wafer Manufacturing

Compatible with thin-film deposition processes such as PECVD, LPCVD, and ALD in wafer production lines, this system precisely distributes silane gas to multiple coating devices, ensuring process stability for silicon nitride and silicon oxide film deposition. It also meets the safety control requirements for high-risk gases in cleanrooms, making it the standard configuration for secondary distribution of specialty gases in wafer fabs.

Photovoltaic Cell Production

Widely used in high-efficiency cell production lines such as TOPCon, HJT, and heterojunction, this system enables the distribution of silane gas to multiple machines during silicon-based thin-film deposition and doping processes. It meets the continuous gas supply demands of high-capacity photovoltaic production lines while providing flexibility for line retrofits and expansions, thereby helping to reduce costs and improve efficiency.

                                                                         - VMB -

Next-Generation Display and Optoelectronics Manufacturing

Serving TFT-LCD, AMOLED, and Mini/Micro LED display panel production lines, as well as fields such as optical fiber preforms and compound semiconductors, we provide stable and controllable silane dispensing and delivery for thin-film deposition and etching processes, tailored to the large-scale, multi-machine gas supply layouts of high-generation production lines.

Research Institutes and Testing Laboratories

Provides small-scale silane distribution solutions for material R&D and process validation platforms in university laboratories and research institutions, balancing operational safety with gas supply precision to meet the needs of small-batch, multi-condition experimental gas applications.

Advantages of Wofly Technology's Products and Services

1. In-house R&D and Manufacturing, with Outstanding Customization Capabilities

As a national-level high-tech enterprise and a “Specialized, Refined, Distinctive, and Innovative” enterprise, Wofly Technology possesses independent R&D and manufacturing capabilities. The company has established its own 8,000-square-meter production base, complete with Class 100 and Class 1,000 cleanroom assembly workshops. The entire production process for the full VMB product series—from solution design and valve assembly to testing and shipment—is completed in-house. Products can be fully customized to meet specific customer requirements regarding the number of gas outlets, pressure parameters, control modes, and installation scenarios, catering to the needs of production lines across various industries and of different scales.

                              Internal View of the VMB Designed Specifically for Silanes

2. Complete Qualifications and Guaranteed Compliance

The company holds a specialized contracting qualification for building mechanical and electrical installation projects, a GC2 qualification for the design and installation of pressure pipelines, and a Work Safety Permit. Our products have obtained multiple certifications, including CE and ISO 9001. Design and manufacturing strictly adhere to national standards for special gas engineering, such as GB 50646. All equipment undergoes comprehensive helium leak testing and functional testing before leaving the factory, ensuring it is ready for compliant operation upon delivery.

                                A Tour of Wofly Technology's Class 1,000 Cleanroom

3. One-Stop Service Across the Entire Industry Chain

Going beyond the simple supply of individual equipment, Wofly Technology provides a comprehensive, one-stop solution covering the entire process—from specialty gas station planning, main pipeline installation, and VMB distribution node layout to end-point secondary piping. This solution encompasses the full lifecycle, including technical consulting, system design, prefabrication and installation, testing and acceptance, and operations and maintenance training. Customers do not need to coordinate with multiple suppliers, significantly reducing project communication and management costs.

                                                                                                               Internal View of the VMB Designed Specifically for Silanes

4. Over a Decade of Industry Expertise and Extensive Implementation Experience

With over a decade of deep expertise in the field of specialty gases for the electronics industry, our services span multiple sectors including semiconductors, photovoltaics, biopharmaceuticals, and research institutes. We have successfully implemented hundreds of specialty gas system engineering projects. Our core team possesses extensive experience in the design and construction of high-risk specialty gas systems, enabling us to respond quickly to customer needs and provide optimal solutions tailored to actual operating conditions.

Wofly Technology’s VMB and Specialty Gas Cabinet Showcase

As the “end-point hub” of electronic specialty gas systems, the silane-specific VMB is a critical component in ensuring safe, stable, and high-purity gas supply to production lines. Wofly Technology will continue to prioritize technology, iteratively optimizing its products for various high-risk specialty gas operating conditions to provide the high-end manufacturing industry with more reliable and tailored specialty gas system solutions.